Inert atmosphere Cluster Tool
Glovebox transfer and Characterization
Inert atmosphere Cluster Tool with the 2D transfer stage pictured above, more components to arrive soon
Description of Instrument:
The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities.
Capabilities:
The two-box cluster (to be installed):
- Custom stands and mechanical connections to minimize vibration;
- Integrated vacuum chamber and e-beam evaporation with 4 sources
2D transfer stage:
- Fully motorized, compute-controlled transfer;
- 9 Degrees of Freedom: sample stage x/y/z/rotate, mask x/y/rotate/tilt, focus;
- Precise translational motion control < 1µm;
- Rotational motion with 0.01° precision;
- 6 Objectives with darkfield mode: 2X, 10X, 20X, 40X, 50X, 100X (3mm working distance);
- PID-controlled heating and cooling of the sample stage, with a maximum stage temperature of 200℃.
Atomic Force Microscopy (to be installed):
- Accommodate large samples, up to 80mm diameter and up to 10mm thick.
- ORCA cantilever holder for conductive AFM measurements
- Customized for operations inside a glovebox
Current Process Capabilities:
Exfoliation and precise transfer stacking of van der Waals heterostructures (x, y, z, twist) in the ambient environment
To Arrive Soon
- Processing and transfer of air-sensitive van der Waals materials and thin films inside the glovebox
- AFM characterization (topography, KPFM, EFM, conductive AFM)
- In-situ physical vapor deposition of metals (Au, Pt, Ti) and oxides (Al2O3)
Technical Contacts:
Jun Zhu | Yangyang Chen | Carlton Drew |
Professor- Physics | Postdoctoral Scholar | Graduate Student |
Email Address: jxz26@psu.edu | yuc552@psu.edu | cvd5506@psu.edu |