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Electron Backscattered Diffractometry (EBSD)

Electron Backscattered Diffractometry (EBSD) is based on automatic indexing of electron backscatter diffraction patterns (EBSP) which can be produced in a properly equipped SEM. OIM provides a complete description of the crystallographic orientations in polycrystalline materials.

Electron backscatter diffraction patterns (or EBSPs) are obtained in the SEM by focusing the electron beam on a crystalline sample. The sample is tilted to approximately 70 degrees with respect to the horizontal. The diffraction pattern is imaged on a phosphor screen. The image is captured using a low-light SIT camera. The bands in the pattern represent the reflecting planes in the diffracting crystal volume. Thus, the geometrical arrangements of the bands are a function of the orientation of the diffraction crystal lattice.

Typical Applications

EBSD is a powerful tool for investigating of polycrystalline microstructure including:

  • Local crystallographic textures
  • Grain boundary analysis
  • Grain size
  • Phase identification and relationship between phases
  • Crystallographic analysis of microgram quantities of material
  • Qualitative Strain Mapping
  • Fracture analysis
  • Substructure analysis
Sample Requirements
  • Highly polished surface


  • Oxford Nordlys Max2