Below is a list of the most popular equipment within the Electrical Characterization Lab. While equipment is often organized into measurement systems, individual specifications are listed for general reference purposes.
Semiconductor Parameter Analyzer: Keithly 4200-SCS
- 4 (2W) SMUs (2 with preamps)
- 2 (20W) SMUs
- Multi-frequency Capacitance Unit (CVU)
Semiconductor Parameter Analyzer: Keysight B1500A
- 4 (2W) Mid Power Source Monitor Unit (MPSMU)
- 2 (20W) High Power Source/Measure Unit (HPSMU)
- Multi Frequency Capacitance Measurement Unit (MFCMU)
- High Voltage Semiconductor Pulse Generator Unit (HV-SPGU)
- Integrated with Semi-automated probe station for unattended wafer measurements
Probe Station: FormFactor 11000B
Manual station
- 8” Triaxial chuck
- Light shielded enclosure
- Temperature range: -60°K to 300°C
- Automated temperature sweeping
Probe Station: Cascade Probe Station
Manual station
- 8” Triaxial chuck
- Light shielded enclosure
- Temperature range: room temperature
- Integrated with a Keithley 4200 SCS Parameter Analyzer
Probe Station: FormFactor 12000KB
Semi-automated station
- 8” Triaxial chuck
- 6 probe manipulators
- Light shielded enclosure
- Temperature range: room temperature
- Integrated with Keysight B1500A for unattended wafer measurements
Probe Station: Lake Shore CRX-VF
Cryogenic (with Hall Coefficient & Van der Pauw Measurement System)
PS-HM-8425 DC Semiautomated Measurement System with Closed Cycle Refrigeration (CCR)
- +/- 2 T typical (2.5 T max.) vertical field superconducting magnet
- Temperature range <10°K to 400°K
- Maximum sample size: 51 mm diameter
- 6 position Hall Bar measurements
- Vacuum or Nitrogen atmosphere available at room temp