Equipment & Training Schedule

Technical Contacts

Drawl, William

Research and Development Engineer

wrd1@psu.edu
814-863-8558

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
wrd1

Mahoney, Bill

Research Technologist

wjm122@psu.edu
814-865-6962

N152 MILLENNIUM SCIENCE COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
wjm122

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Evaporation

Deposition & Growth

Temescal FC-2000

Multiple fixture options available:​

  • Precision lift-off deposition fixtures (TP-8 & HULA fixtures) ​
    • Sample mounting area for up to five 150mm dia. substrates​
  • Batch conformal coating fixture (HSP Fixture)​
    • Sample mounting area for up to:​
      • Six 150mm dia. substrates and​
      • Twelve 100mm substrates and​
      • Twelve 50mm substrates​
  • Fast thick film deposition​
    • Up to 1 micron in 5 min (40A/sec)​
  • Variable angle coating fixture ​
    • Sample mounting area for up to:​
      • One 150mm dia. substrate​
  • Auto flipping fixture for double-sided coating.​
    • Sample mounting area for up to:​
      • Two 200mm dia. substrate​

MFC controlled gas inlet ​

  • For O2 bleeding to improve quality of deposited oxides.​

3 Quartz Heat Lamps​

  • For chamber heating up to 300°C​
    • 8 pocket e-gun source:​
      • 10 kW power supply​
      • Strong permanent magnet design reduces BSE and electron damage to photoresists​

Single resistive (thermal) source​

  • 2 kW power supply​

Fully integrated, recipe-driven process and vacuum control user interface​

  • Datalog /Historical log​
    • captures over 200 variables​ ​

Materials Processed

  • Alumina (Al2O3)​
  • Aluminum (Al)​
  • Chromium (Cr)​
  • Cobalt (Co)​
  • Copper (Cu)​
  • Germanium (Ge)​
  • Gold (Au)​
  • Iron (Fe)​
  • Molybdenum (Mo)​
  • Nichrome (NiCr)​
  • Nickel (Ni)​
  • Palladium (Pd)​
  • Permalloy (80% Ni/20% Fe)​
  • Platinum (Pt)​
  • Rhenium (Re)​
  • Silicon (Si)​
  • Silicon Dioxide (SiO2)​
  • Silver (Ag)​
  • Tantalum (Ta)​
  • Titanium (Ti)​
  • Titanium Dioxide (TiO2)​
  • Tungsten (W)​
  • Ytterbium Oxide (Yb2O3)​

Training

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RIMS Name

Temescal FC-2000

 


Kurt J Lesker Lab-18Kurt J. Lesker Lab-18

The Lab-18 evaporator is computer controlled, recipe-driven, dual-thermal and 4-pocket e-beam deposition system.  The system employs a load lock design that supports substrates up to 6" in diameter and substrate cooling down to -20°C with rotation capabilities.  A Kaufman-Robinson ion source is also available on the system.

Materials Available

  • Alumina (Al2O3)
  • Aluminum (Al)
  • Chromium (Cr)
  • Cobalt (C0)
  • Copper (Cu)
  • Germanium (Ge)
  • Gold (Au)
  • Iron (Fe)
  • Molybdenum (Mo)
  • Nichrome (NiCr)
  • Nicel (Ni)
  • Palladium (Pd)
  • Platinum (Pt)
  • Silicon (Si)
  • Silcon Dioxide (SiO2)
  • Silver (Ag)
  • Tatalum (Ta)
  • Titanium (Ti)
  • Titanium Dioxide (TiO2)
  • Tungsten (W)

Training

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RIMS Name

Evaporator Lab #18


Specialty Coating Systems Parylene Thermal Evaporator

The Specialty Coating Systems is a dedicated parylene evaporator that deposits a totally conformal film. Parylene is a chemically inert polymer that has many great electrical, optical, mechanical, and biological properties. Several different types of parylene are stocked.

Capabilities

Coatings

  • Room Temperature Deposition
  • Conformal coating
  • Inert and Chemically Resistant
  • Clear to Opaque

Applications

  • Conformal Coating of Printed Circuit Boards for Protection Against Moisture and Corrosion
  • Surface Passivation and Environmental Protection of Semiconductor Devices
  • Conformal Coating of Biomedical Devices for Environmental Protection and Electrical Insulation
  • Parylene has found acceptance in a myriad of industrial, aerospace, chemical, automotive, consumer, pharmaceutical, and defense applications

Materials

Parylene Dimers from Specialty Coating Systems

  • Parylene C
  • Parylene D
  • Parylene N

Additional Resources

RIMS Name

Evaporator: Parylene

Training

Visit the Equipment & Training Information