Equipment & Training Schedule

Equipment List

Equipment Contacts

Gehoski, Kathleen

Research and Development Engineer

Technical Lead

kag31@psu.edu
814-865-7443

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
kag31

Eichfeld, Chad

Research and Development Engineer

cme133@psu.edu
814-865-8976

N-153 Millennium Science Complex
University Park, PA 16801

PSU UserID: 
cme133

Labella, Michael

Litho Process Engineer

mil102@psu.edu
814-863-4339

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
mil102

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Lithography

Lithography

Overview

Lithography is a process of dispensing a photo sensitive polymer onto a substrate, exposing the coated substrate to a UV light source, and developing away the unwanted polymer. There are methods that utilize a physical plate to mask off unwanted light with predefined geometries, and methods that utilize a Computer Aided Design (CAD) drawing to expose the polymer with a laser or electron beam.

The polymer left on the substrate will serve as protection of the substrate for subsequent processing; etch, deposition, or implantation.


Lithography techniques available at Penn State. (Photo Credit: Penn State)