Equipment
Dynatronix MicroStar Pulse Precise
The electrochemical plating system is integrated into a dedicated WAFAB wet bench and features a Dynatronix MicroStar Pulse Precise programmable power supply which offers good process control and uniformity.
Configurations
- Up to 6" wafers
- Dynatronix MicroStar Pulse Precise programmable power supply
- Offers good process control and uniformity
Materials
- Nickel
- Gold
- Copper
- Training: Please contact Andy Fitzgerald for training or for users who do not need electroplating regularly please contact the Guy Lavallee to have the deposition done for them.