Plating

Equipment

Dynatronix MicroStar Pulse Precise

The electrochemical plating system is integrated into a dedicated WAFAB wet bench and features a Dynatronix MicroStar Pulse Precise programmable power supply which offers good process control and uniformity.

Configurations

  • Up to 6" wafers
  • Dynatronix MicroStar Pulse Precise programmable power supply
  • Offers good process control and uniformity
  • ...others upon approval

Materials

  • Nickel
  • Gold
  • Copper
  • ...others upon approval

Training: Please contact Guy Lavallee or Andy Fitzgerald for training or for users who do not need oxidation regularly please contact the staff to have the deposition done for them.
Visit the Equipment & Training Information