Nanofab Overview

The Nanofabrication Laboratory in the Millennium Science Complex is supported by a dedicated staff and has world-class capabilities in the areas of deposition, etch, lithography, material modification and characterization. The sheer number of materials processed - more than sixty five (65) materials can be deposited and over seventy (70) materials can be dry etched - in the suite of tools resident in the facility is testament to the flexibility of the toolset and the staff that supports it. From the wide variety of available processes, academic and industrial researchers have the ability to develop and fabricate a wide array of novel devices.

Core Expertise and Research Areas

The general theme of the Nanofabrication Laboratory's core areas of expertise is the ability to handle non-standard materials alongside the more common materials. Procedures are in place to handle a wide variety of research that often uses non-standard materials.

For more information or to inquire about handling a novel material please contact