Equipment & Training Schedule

Equipment List

Technical Contacts

Drawl, William

Research and Development Engineer

wrd1@psu.edu
814-863-8558

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
wrd1

Jones, Beth

Research and Development Engineer

baj2@psu.edu
1-814-863-1694

N104 Millennium Science Complex University Park, PA 16802

PSU UserID: 
baj2

Liu, Bangzhi

Research Associate

bul2@psu.edu
814-863-0964

N154 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
bul2

Fitzgerald, Andrew

Engineering Support Specialist

amf24
814-867-2657

N153 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
amf24

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Deposition and Growth

Deposition and Growth

Electroplating

A dedicated multiple bath WAFAB bench for plating with a Dynatronix MicroStar Pulse Precise series pulsed power supply system for common metal electrochemical plating.

Common materials:

  • Nickel
  • Gold
  • Copper
  • Others upon approval

Equipment:

  • Up to 6" wafers
  • Dynatronix MicroStart Pulse Precise programmable power supply
  • Offers good process control and uniformity
  • Temperature control and recirculation in bench
  • Dump rinse
  • ...others upon approval

RIMS Name:

Wet Chem Electroplating Bench (MSC)

Training:

Please contact Andrew Fitzgerald for training.