Tool Configuration
Instrument DOI: 10.60551/ehag-wc47
- 305mm diameter electrode
- Mechanical Clamp with He backside cooling for better temperature control during etching
- Temperature compensated capacitance manometer
- Digital control Mass flow controllers for faster response
- Gases: O2, SF6, Ar, CF4
- Uniformity ring surrounding electrode to improve etch uniformity
- SQL server for recipe and data-logging storage
- Pendulum valve with closed loop pressure control for precise pressure control
Tool Cost of Ownership
- <1m2 system foot print (extremely compact)
- Fully DeviceNet driven (digital communication with MFCs, gauges, pneumatics, turbo molecular pump, RF power supply, matching network)
- System can send e-mails to tech support to report on potential issues (ToolMail™)
- Extensive remote support capabilities
- Monitor turbo pump key parameters (temperature, current, speed, etc.)
- Monitor MFC calibration data
- Monitor pressure gauge calibration data
- Monitor bus voltages etc.
- ANSI ISA 88 compliant (traceability)