Polymer Etch: Vision RIE

Tool Configuration

• 305mm diameter electrode
• Mechanical Clamp with He backside cooling for better temperature control during etching
• Temperature compensated capacitance manometer
• Digital control Mass flow controllers for faster response
  • Gases: O2, SF6, Ar, CF4
• Uniformity ring surrounding electrode to improve etch uniformity
• SQL server for recipe and data-logging storage
• Pendulum valve with closed loop pressure control for precise pressure control

Tool Cost of Ownership

• <1m² system foot print (extremely compact)
• Fully DeviceNet driven (digital communication with MFCs, gauges, pneumatics, turbo molecular pump, RF power supply, matching network)
• System can send e-mails to tech support to report on potential issues (ToolMail™)
• Extensive remote support capabilities
  • Monitor turbo pump key parameters (temperature, current, speed, etc.)
  • Monitor MFC calibration data
  • Monitor pressure gauge calibration data
  • Monitor bus voltages etc.
• ANSI ISA 88 compliant (traceability)