Equipment & Training Schedule

Technical Contacts

Fitzgerald, Andrew

Engineering Support Specialist

amf24
814-867-2657

N153 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
amf24

Subscribe

Free subscriptions to newsletters, print publications, and more

Wet Chemistry Etch

Details

There are solvent, acid, base, and dedicated SC1/SC2 cleaning hoods in the cleanroom that are stocked with standard semiconductor grade chemicals as well as pre-mixed, specialty chemicals used for resist strip, thin film etch, and substrate cleaning.

Wet Chemistry Equipment:

SCI/SC2 Standard Clean Bench

RIMS Name

SC1/SC2 Bench (MSC)

Wet Bench Training

Visit the Equipment & Training Information


3 Acid-based Benches

RIMS Name

SC1/SC2 Bench (MSC)

Wet Bench Training

Visit the Equipment & Training Information


3 Solvent Benches

RIMS Name

Solvent SS Bench 1 (MSC)
Solvent SS Bench 2 (MSC)
Solvent SS Bench 3 (MSC)

Wet Bench Training

Visit the Equipment & Training Information


TMAH/KOH Benches

RIMS Name

KOH/TMAH Bench (MSC)

Wet Bench Training

Visit the Equipment & Training Information

Share