Instrument DOI: 10.60551/x6wa-q176
The Plasma-Therm Versalock 700 is a dual chamber high-density inductively coupled plasma (ICP) etcher. The system has chlorine and fluorine chemistries plumbed to both chambers, but processes are segregated with one chlorine-based chamber and the other fluorine-based. This is a fully computer controlled system that can handle small parts through 150mm (6 inch) wafers.
CAPABILITIES
This is a partial list of materials etched. If you do not see your material listed here please ask the staff, Guy Lavallee or Shane Miller for guidance.
Ceramics
- Lanthanum Calcium Manganese Oxide - LCMO
- Lanthanum Strontium Manganite - LSM or Lanthanum Strontium Manganese Oxide - LSMO
- Lithium Niobate (LiNbO3)
Dielectrics
- Alumina (Al2O3)
- Hafnium Oxide (HfO2)
- Gorilla Glass
- Iridium Oxide (IrO2)
- Lanthanum Oixde (La2O3)
- Quartz
- Sapphire
- Silicon Dioxide (SiO2)
- Silicon Nitride (Si3N4)
- Tantalum Oxide (Ta2O5)
- Titanium Dioxide (TiO2)
Ferromagnetic
- Gadolinium Nitride (GdN)
Metals
- Aluminum (Al)
- Antimony (Sb)
- Chromium (Cr)
- Gadolinium
- Gold (Au)
- Iron (Fe)
- Molybdenum (Mo)
- Palladium (Pd) (under development)
- Platinum (Pt)
- Tantalum (Ta)
- Titanium (Ti)
- Titanium Aluminum (TiAl)
- Titanium Nitride (TiN)
- Titanium Tungsten (TiW)
- Tungsten (W)
Semiconductors
- Aluminum Antimonide (AlSb)
- Aluminum Gallium Arsenide (AlGaAs)
- Aluminum Indium Arsenide (AlInAs)
- Gallium Arsenide (GaAs)
- Gallium Nitride (GaN)
- Germanium (Ge)
- Indium Arsenide (InAs)
- Indium Gallium Arsenide (InGaAs)
- Indium Phosphide (InP)
- Silicon (Si)
- Silicon Carbide (SiC)
- Silicon Germanium (SiGe)
Polymers
- BARLi anti-reflective coating (resist)
- Carbon Nanotubes
- poly(dioctyl-bithiophene) - PDOT
Others
- Graphene
- Graphene fluorination
- Magnesium Arsenide (Mg3As2)
Transparent Conductive Oxides
- Indium Tin Oxide - ITO (under development)
- Zinc Tin Oxide -- ZTO
PROCESSES
There exists at least one process for each of the materials listed above.
NOTE: Since the system is used to etch a variety of different materials, a strict cleaning procedure (recipe) has been implemented to ensure process repeatability.