Image: Woollam M-2000F Focused Beam Spectroscopic Ellipsometer
Woolllam M-2000XF-193 is a focused beam fixed angle ellipsometer. Specs are as follows:
- Fixed incident angle: 65°
- Spot size of 25µm x 60 µm
- Spectral range: 193-1000nm
- Automated mapping stage: 200mmX200mm
Typical applications
- Thin film thickness measurements including a variety of materials, including dielectrics, organics, semiconductors, and even metal layers;
- Measure film as thin as a fraction of a nanometer;
- Measure film thickness upto 50 µm for dielectrics, upto 50 nm for absorbing films like metal;
- Measure film with multilayer of different materials;
- Measure refractive index;
- Mapping thickness uniformity on wafers upto 8”;
- Measure film thickness on patterned samples.