Auger Electron Spectroscopy (AES)
Auger electrons emitted from the surface are drawn into a spectrometer that ultimately measures their kinetic energy distribution. The technique is inherently surface sensitive because the Auger electrons typically have low kinetic energies (<3kv). The Auger spectra contain information about the concentration and (sometimes) the chemical environment of surface and near-surface atoms. Greater depths (up to a few microns) can be probed by coupling the technique with ion milling. Lateral distributions of elements can be measured with sub-micron resolution.
