Equipment & Training Schedule

Equipment List

Technical Contacts

Gehoski, Kathleen

Research and Development Engineer

Technical Lead

kag31@psu.edu
814-865-7443

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
kag31

Eichfeld, Chad

Research and Development Engineer

cme133@psu.edu
814-865-8976

N-153 Millennium Science Complex
University Park, PA 16801

PSU UserID: 
cme133

Labella, Michael

Litho Process Engineer

mil102@psu.edu
814-863-4339

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
mil102

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Lithography

Lithography

Laser Writer

The laser-writer is a High Resolution pattern generator (PG) for mask making and direct writing on any flat surface coated with photoresist. The user would draw their desired patterns with a Computer Aided Design (CAD) software, the imported CAD file would direct the laser to areas on the substrate to expose the photoresist. This technique is often referred to as "maskless or direct write"

Heidelberg DWL 66(+)

  • Substrates up to 9” x 9”
  • Features down to 600 nm
  • Address grid down to 10 nm
  • Real-time autofocus
  • Vector and raster exposure modes
  • Exchangeable write modes
  • Camera system for metrology and alignment
  • Front to backside alignment
  • Climate controlled chamber
  • Multiple data input formats