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Equipment List

Technical Contacts

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Characterization

Characterization

Microscopy

Microscopy

Nikon L200ND Optical Microscope

The Nikon L200ND is a high resolution optical microscope with complimentary high resolution image/movie capture including 3D capabilities. I can operate in episcopic and diascopic (reflected and through sample lighting, respectively) modes. All lenses can operate in brightfield, darkfield, and DIC modes.

Leo 1530 Field Emission Scanning Electron Microscope (FESEM)

The Leo 1530 Field Emission Scanning Electron Microscope (FESEM) is a fully software controlled high resolution FESEM located within the cleanroom. The GEMINI electron column is designed to reduce sensitivity to stray magnetic fields and features low voltage operation, which often allows imaging of non-conductive samples without the need of a conductive coating. Samples from small parts up to 150mm wafers can be imaged using a typical off axis secondary electron detector, an in-lens detector, and a backscatter electron (BSE) detector. Resolution better than 5nm is typical of conductive samples.

Equipment/Systems

  • Nikon L200ND Optical Microscope
  • LEO 1530 MERLIN (FESEM)