Sol-Gel

Deposition & Growth

Sol-gel (complex oxide) deposition stations

The two sol-gel stations for depositing complex oxides such as PZT are located in a low humidity room to ensure high quality films. The stations include Brewer spinners for casting the sol-gel and high temperature hotplates to pyrolize the cast films before crystalizing with a rapid thermal process in the RTP 610 for complex oxides.

Capabilities

A wide array of sol-gels can be deposited. In addition to the sol-gels currently deposited, others would be considered upon request.
(Contact: Sandie Elder at nanofab@psu.edu or by dialing +1.814.865.3225)

RIMS Name

PZT Depo Spin Bench 1 PZT Depo Spin Bench 2

Training

Please contact Beth Jones for training.  For other training: Visit the Equipment & Training Information