Research and Development Engineer
N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802
The Karl Suss MJB3 had been coopted to serve as a micro-contact printer of sol-gel mixtures using a polymer "stamp." The complete manual operation of the MJB3 along with its alignment capabilities lends itself well to contact printing of sol-gel "ink". The maximum substrate size is 3" wafers. Most of the stamps are in the inch x inch range. This system is located in the complex oxide sol-gel section of the cleanroom.
Features down to 3µm have been successfully printed.
Litho: MJB3 (SMIL)