Technical Contacts

Gehoski, Kathleen

Research and Development Engineer

Technical Lead

kag31@psu.edu
814-865-7443

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
kag31

Labella, Michael

Litho Process Engineer

mil102@psu.edu
814-863-4339

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
mil102

Drawl, William

Research and Development Engineer

wrd1@psu.edu
814-863-8558

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
wrd1

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Soft Lithography

Lithography

µm lines of PZT printed with micro-contact printing.
(Photo Credit: STM group)

Karl Suss MBJ3 for micro-contact printing - Imprint & Microcontact

The Karl Suss MJB3 had been coopted to serve as a micro-contact printer of sol-gel mixtures using a polymer "stamp." The complete manual operation of the MJB3 along with its alignment capabilities lends itself well to contact printing of sol-gel "ink". The maximum substrate size is 3" wafers. Most of the stamps are in the inch x inch range. This system is located in the complex oxide sol-gel section of the cleanroom.

Results

Features down to 3µm have been successfully printed.

RIMS Name

Litho: MJB3 (SMIL)

Training

Visit the Equipment & Training Information