Technical Contacts

Lavallee, Guy

Etch Technical Lead

gpl107@psu.edu
814-865-9339

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
gpl107

Fitzgerald, Andrew

Engineering Support Specialist

amf24
814-867-2657

N153 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
amf24

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Plating

Deposition & Growth

Dynatronix MicroStart Pulse Precise

The electrochemical plating system is integrated into a dedicated WAFAB wet bench and features a Dynatronix MicroStart Pulse Precise programmable power supply which offers good process control and uniformity.

Capabilities

Configurations
  • Up to 6" wafers
  • Dynatronix MicroStart Pulse Precise programmable power supply
  • Offers good process control and uniformity
  • ...others upon approval
Materials
  • Nickel
  • Gold
  • Copper
  • ...others upon approval

RIMS Name

Wet Chem Electroplating Bench (MSC)

Training

Please contact Andrew Fitzgerald for training.
For other training: Visit the Equipment & Training Information