Technical Contacts

Gehoski, Kathleen

Research and Development Engineer

Technical Lead

kag31@psu.edu
814-865-7443

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
kag31

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Curved Surfaces

Lithography

Curved Surfaces

Lithography on curved samples and samples with very tall or deep features is a new area of development being undertaken by Penn State which opens up new possibilities in areas of optics, meta-materials and even electronics. It is comprised of three major components.

Resist application

The typical spin casting of resist does not work well on curved surfaces so a special mist deposition tool has been acquired. It can controllably and reliably atomize and apply resist to curved surfaces.

Curved surface mapping

A specialized tool is used to map the curved surface at high resolution. The data is fed into the exposure tool.

Training

Visit the Equipment & Training Information