Equipment & Training Schedule

Equipment List

Technical Contacts

Gehoski, Kathleen

Research and Development Engineer

Technical Lead

kag31@psu.edu
814-865-7443

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
kag31

Eichfeld, Chad

Nanofab Director of Operations

Nanolithography Engineer

cme133@psu.edu
814-865-8976

N-153 Millennium Science Complex
University Park, PA 16801

PSU UserID: 
cme133

Labella, Michael

Litho Process Engineer

mil102@psu.edu
814-863-4339

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
mil102

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Lithography

Lithography

Manufacture's Photo Resist Coating Process Data Sheet

E-Beam

I-Line

Broad-Band

Lift-Off

Thick

Ancillary

HSQ XR 1541 Download AZ 5214 Download AZ 50 XT Download LOR 2A Download AZ 4620 Download BaRli II Download
PMMA 495 A6 Download AZ NLOF 2020 Download AZ 5214 Download LOR 5A Download AZ 50 XT Download Omni Coat Download
PMMA 495 A9 Download JSR NFR 105G Download AZ NLOF 2020 Download PMGI SF 2 Download BCB 3022-46 Download HMDS Download
PMMA 950 A2 Download Shipley SPR 1805 Download Shipley SPR 1805 Download PMGI SF 5 Download KMPR 1010 Download ProTek Download
PMMA 950 A3 Download Shipley SPR 1813 Download Shipley SPR 1813 Download PMGI SF 6 slow Download SU8 5 Download Surpass 3000 Download
MaN 2401 Download Shipley SPR 1827 Download Shipley SPR 1827 Download PMGI SF 9 Download SU8 10 Download Surpass 4000 Download
MaN 2403 Download Shipley SPR 220.7 Download Shipley SPR 220.7 Download PMGI SF 11 Download SU8 25 Download  
MMA EL 06 Download Shipley SPR 3012 Download Shipley SPR 3012 Download   SU8 50 Download  
MMA EL 11 Download Shipley SPR 950.8 Download     SU8 100 Download  
ZEP 520A Download Shipley SPR 955 2.1 Download