Photo Resist Coating

Polymer Coating Techniques

The Nanofab has 3 ways to dispense polymers. The most common method is a manual dispense in one of the 4 spin coat benches. The CEE 4500 is an automated method that can dispense and automatically transfer to hot plate ovens. The final method is spray coating, this is ideal for curved substrates.

The Nanofab supplies over 50 polymers, from I-line, e-beam, ultra-thick, and Lift-Off products.


Spin Coat Bench

CEE 4500 Auto Track

Prism Spray Coater

Manufacture's Photo Resist Coating Process Data Sheet

E-Beam

I-Line

Broad-Band

Lift-Off

Thick

Ancillary

HSQ XR 1541 AZ 5214 AZ 50 XT LOR 2A AZ 4620 BaRli II
PMMA 495 A6 AZ NLOF 2020 AZ 5214 LOR 5A AZ 50 XT Omni Coat
PMMA 495 A9 JSR NFR 105G AZ NLOF 2020 PMGI SF 2 BCB 3022-46 HMDS
PMMA 950 A2 Shipley SPR 1805 Shipley SPR 1805 PMGI SF 5 KMPR 1010 ProTek
PMMA 950 A3 Shipley SPR 1813 Shipley SPR 1813 PMGI SF 6 slow SU8 5 Surpass 3000
MaN 2401 Shipley SPR 1827 Shipley SPR 1827 PMGI SF 9 SU8 10 Surpass 4000
MaN 2403 Shipley SPR 220.7 Shipley SPR 220.7 PMGI SF 11 SU8 25  
MMA EL 06 Shipley SPR 3012 Shipley SPR 3012   SU8 50  
MMA EL 11 Shipley SPR 950.8     SU8 100  
ZEP 520A Shipley SPR 955 2.1        

Training

Visit the Equipment & Training Information