Equipment & Training Schedule

Technical Contacts

Labella, Michael

Litho Process Engineer

mil102@psu.edu
814-863-4339

N106 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
mil102

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Laser-Writer

Laser-Writer Lithography

The laser-writer is a High Resolution pattern generator (PG) for mask making and direct writing on any flat surface coated with photoresist.

A digital pattern file, created by the user with Computer Aided Design (CAD) software, direct the laser to areas on the substrate to expose the photoresist.  This technique is often referred to as "maskless or direct write" lithography.

Heidelberg DWL 66(+)

  • Substrates up to 9” x 9”
  • Features down to 600 nm
  • Address grid down to 10 nm
  • Real-time autofocus
  • Vector and raster exposure modes
  • Exchangeable write modes
  • Camera system for metrology and alignment
  • Front to backside alignment
  • Climate controlled chamber
  • Multiple data input formats

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