Equipment & Training Schedule

Equipment List

Technical Contacts

Lavallee, Guy

Etch Technical Lead

gpl107@psu.edu
814-865-9339

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
gpl107

Miller, Shane

Process Engineer

spm145@psu.edu
814-865-3300

N154 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
spm145

Fitzgerald, Andrew

Engeering Support Specialist

amf24
814-867-2657

N153 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
amf24

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Etching

Etching

Wet Chemistry Etching

Details

There are solvent, acid, base, and dedicated SC1/SC2 cleaning hoods in the cleanroom that are stocked with standard semiconductor grade chemicals as well as pre-mixed, specialty chemicals used for resist strip, thin film etch, and substrate cleaning.

Equipment/Systems