Polymer Etch: Vision RIE

305mm diameter electrode
Mechanical Clamp with He backside cooling for better temperature control during etching
Temperature compensated capacitance manometer
Digital control Mass flow controllers for faster response
- Gases: O2, SF6, Ar, CF4
Uniformity ring surrounding electrode to improve etch uniformity
SQL server for recipe and data-logging storage
Pendulum valve with closed loop pressure control for precise pressure control

<1m² system foot print (extremely compact)
Fully DeviceNet driven (digital communication with MFCs, gauges, pneumatics, turbo molecular pump, RF power supply, matching network)
System can send e-mails to tech support to report on potential issues (ToolMail™)
Extensive remote support capabilities
- Monitor turbo pump key parameters (temperature, current, speed, etc.)
- Monitor MFC calibration data
- Monitor pressure gauge calibration data
- Monitor bus voltages etc.
ANSI ISA 88 compliant (traceability)

Equipment & Training Schedule