Equipment & Training Schedule

Equipment List

Technical Contacts

Drawl, William

Research and Development Engineer

wrd1@psu.edu
814-863-8558

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
wrd1

Jones, Beth

Research and Development Engineer

baj2@psu.edu
1-814-863-1694

N104 Millennium Science Complex University Park, PA 16802

PSU UserID: 
baj2

Liu, Bangzhi

Research Associate

bul2@psu.edu
814-863-0964

N154 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
bul2

Fitzgerald, Andrew

Engeering Support Specialist

amf24
814-867-2657

N153 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
amf24

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Deposition and Growth

Deposition and Growth

Sol-Gel Complex Oxide (sol-gel)

An area of the cleanroom is dedicated to depositing piezoelectric, pyroelectric, and ferroelectric complex oxide films from sol-gel solutions developed by researchers at Penn State University. Films include PZT (lead zirconate titanate), PLZT (lead lanthanum zirconate titanate), PNN-PZT (lead nickel niobate - lead zirconate titanate), and lead titanate. Many others have been used and others can be developed. 

Polyurethane (PU) stamps: PU is used when working with certain "inks" such as some PZT based sol-gel. Stamps are usually cast from PDMS sub-molds.

Equipment:


Sol-gel (complex oxide) deposition stations

The two sol-gel stations for depositing complex oxides such as PZT are located in a low humidity room to ensure high quality films. The stations include Brewer spinners for casting the sol-gel and high temperature hotplates to pyrolize the cast films before crystalizing with a rapid thermal process in the RTP 610 for complex oxides.

Capabilities:

A wide array of sol-gels can be deposited. In addition to the sol-gels currently deposited, others would be considered upon request.

RIMS Name:

PZT Depo Spin Bench 1

Training:

Please contact Beth Jones for training. 


RTP-600S Rapid Thermal Annealer

Rapid thermal annealing of up to 6" wafers.  Used for crystalizing complex oxide films.  Located in the same climate controlled room as the sol-gel deposition stations.

RIMS Name:

RTP 600s

Training:

Please contact Beth Jones for training. 


RTP-810 Allwin Rapid Thermal Annealer

Rapid thermal annealing of up to 8" wafers.  Used for crystalizing complex oxide films.  Located in the same climate controlled room as the sol-gel deposition stations.

RIMS Name:

RTP 810 Allwin

Training:

Please contact Beth Jones for training.