Equipment & Training Schedule

Equipment List

Technical Contacts

Drawl, William

Research and Development Engineer

wrd1@psu.edu
814-863-8558

N105 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
wrd1

Jones, Beth

Research and Development Engineer

baj2@psu.edu
1-814-863-1694

N104 Millennium Science Complex University Park, PA 16802

PSU UserID: 
baj2

Liu, Bangzhi

Research Associate

bul2@psu.edu
814-863-0964

N154 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
bul2

Fitzgerald, Andrew

Engineering Support Specialist

amf24
814-867-2657

N153 MILLENNIUM SCI COMPLEX
UNIVERSITY PARK, PA 16802

PSU UserID: 
amf24

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Deposition and Growth

Deposition and Growth

Evaporation

Evaporation, a type of physical vapor deposition, is available using both general-purpose evaporators and a specific polymer evaporator. All three general evaporators offer a wide variety of metals / compounds and up to 7 different metals loaded at one time. They have 4 pocket electron gun and at least two thermal sources for great flexibility in depositing multi-material film stacks.

Evaporated Materials:

  • Alumina (Al2O3)
  • Aluminum
  • Chromium (Cr)
  • Cobalt (Co)
  • Copper (Cu)
  • Germanium (Ge)
  • Gold (Au)
  • Iron (Fe)
  • Molybdenum (Mo)
  • Nickel (Ni)
  • Nichrome (NiCr)
  • Palladium (Pd)
  • Platinum (Pt)
  • Silicon (Si)
  • Silicon Dioxide (SiO2)
  • Silver (Ag)
  • Tantalum (Ta)
  • Titanium (Ti)
  • Titanium Dioxide (TiO2)
  • Tungsten (W)
  • ...and others upon request.

Equipment/Systems:

Kurt J. Lesker Lab-18

Kurt J Lesker Lab-18

The Lab-18 evaporator is computer controlled, recipe-driven, dual-thermal and 4-pocket e-beam deposition system.  The system employs a load lock design that supports substrates up to 6" in diameter and substrate cooling down to -20°C with rotation capabilities.  A Kaufman-Robinson ion source is also available on the system for in-situ surface preperation.

Materials Available:

  • Alumina (Al2O3)
  • Aluminum (Al)
  • Chromium (Cr)
  • Cobalt (C0)
  • Copper (Cu)
  • Germanium (Ge)
  • Gold (Au)
  • Iron (Fe)
  • Molybdenum (Mo)
  • Nichrome (NiCr)
  • Nicel (Ni)
  • Palladium (Pd)
  • Platinum (Pt)
  • Silicon (Si)
  • Silcon Dioxide (SiO2)
  • Silver (Ag)
  • Tatalum (Ta)
  • Titanium (Ti)
  • Titanium Dioxide (TiO2)
  • Tungsten (W)

RIMS Name:

Evaporator: Lab 18

Training:

Visit the Equipment Training Information Page to get details on how to get trained on this equipment 

 


Semicore E-Gun Thermal Evaporator

The Semicore is a planetary style evaporator that is capable of evaporating on a large number of substrates at the same time using up to 6 different source materials all during one pumpdown. There also exists a fixture for a mounts a smaller number of samples for a lift-off configuration.

Sources:

  • Four Electron Beam Crucible Pockets
  • A set Thermal/Resistive of posts

Sample Mounting:

  • Planetary Mounts (Conformal Coating)
    • 25 - 3 inch wafers
    • 8 - 4 inch wafers
    • 10 - 6 inch wafers (2 planetary) - cross drilled enabling the mounting of small parts
  • Lift-off Mount (Non-Conformal Coating)

Components:

  • Automated deposition controller
  • Quartz Crystal Thickness/Rate Monitor
  • Dry Pumping Package
    • Cryo high vacuum pump
    • Dry roughing pump
    • Average pump down time of 1.5 hours from atmosphere to 1x10-6 Torr
  • Chamber/Sample Heating (Heat Lamps)
  • Additional electrical feedthroughs for accessories

Materials:

  • Alumina (Al2O3)
  • Aluminum (Al)
  • Chromium (Cr)
  • Colbolt (Co)
  • Copper (Cu)
  • Germanium (Ge)
  • Gold (Au)
  • Iron (Fe)
  • Molybdenum (Mo)
  • Nichrome (NiCr)
  • Nickel (Ni)
  • Palladium (Pd)
  • Platinum (Pt)
  • Silicon (Si)
  • Silicon Dioxide (SiO2)
  • Silver (Ag)
  • Tantalum (Ta)
  • Titanium (Ti)
  • Titanium Dioxide (TiO2)
  • Tungsten (W)
  • Other materials will be considered by the staff. Please contact us with your request.

RIMS Name:

Evaporator: Semicore

Training:

Visit the Equipment Training Information Page to get details on how to get trained on this equipment 

 


Specialty Coating Systems Parylene Thermal Evaporator

The Specialty Coating Systems is a dedicated parylene evaporator that deposits a totally conformal film. Parylene is a chemically inert polymer that has many great electrical, optical, mechanical and biological properties. Several different types of parylene are stocked.

Coating Characteristics:

  • Room Temperature Deposition
  • Conformal coating
  • Inert and Chemically Resistant
  • Clear to Opaque

Applications:

  • Conformal Coating of Printed Circuit Boards for Protection Against Moisture and Corrosion
  • Surface Passivation and Environmental Protection of Semiconductor Devices
  • Conformal Coating of Biomedical Devices for Environmental Protection and Electrical Insulation
  • Parylene has found acceptance in a myriad of industrial, aerospace, chemical, automotive, consumer, pharmaceutical, and defense applications

Materials:

Parylene Dimers from Specialty Coating Systems

  • Parylene C
  • Parylene D
  • Parylene N

Additional Resources:

RIMS Name:

Evaporator: Parylene

Training:

Visit the Equipment Training Information Page to get details on how to get trained on this equipment