Evaporation

a doctoral student in materials science and engineering, in the Nanofab with the Temescal. Image: Penn State

Equipment

Temescal FC-2000

Multiple fixture options available:

Precision lift-off deposition fixtures (TP-8 & HULA fixtures)
- Sample mounting area for up to five 150mm dia. substrates
Batch conformal coating fixture (HSP Fixture)
- Sample mounting area for up to:
  - Six 150mm dia. substrates and
  - Twelve 100mm substrates and
  - Twelve 50mm substrates
Fast thick film deposition
- Up to 1 micron in 5 min (40A/sec)
Variable angle coating fixture
- Sample mounting area for up to:
  - One 150mm dia. substrate
Auto flipping fixture for double-sided coating.
- Sample mounting area for up to:
  - Two 200mm dia. substrate

MFC controlled gas inlet 

For O₂ bleeding to improve quality of deposited oxides.

3 Quartz Heat Lamps

For chamber heating up to 300°C
- 8 pocket e-gun source:
  - 10 kW power supply
  - Strong permanent magnet design reduces BSE and electron damage to photoresists

Single resistive (thermal) source

2 kW power supply

Fully integrated, recipe-driven process and vacuum control user interface

Datalog /Historical log
- captures over 200 variables

Materials Processed

Alumina (Al₂O₃)
Aluminum (Al)
Chromium (Cr)
Cobalt (Co)
Copper (Cu)
Germanium (Ge)
Gold (Au)
Iron (Fe)
Molybdenum (Mo)
Nichrome (NiCr)
Nickel (Ni)
Palladium (Pd)
Permalloy (80% Ni/20% Fe)
Platinum (Pt)
Rhenium (Re)
Silicon (Si)
Silicon Dioxide (SiO₂)
Silver (Ag)
Tantalum (Ta)
Titanium (Ti)
Titanium Dioxide (TiO₂)
Tungsten (W)
Ytterbium Oxide (Yb₂O₃)

Training: Visit the Equipment & Training Information

RIMS Name: Temescal FC-2000

Kurt J. Lesker Lab-18

The Lab-18 evaporator is computer controlled, recipe-driven, dual-thermal and 4-pocket e-beam deposition system. The system employs a load lock design that supports substrates up to 6" in diameter and substrate cooling down to -20°C with rotation capabilities. A Kaufman-Robinson ion source is also available on the system.

Materials Available:

Alumina (Al₂O₃)
Aluminum (Al)
Chromium (Cr)
Cobalt (C0)
Copper (Cu)
Germanium (Ge)
Gold (Au)
Iron (Fe)
Molybdenum (Mo)
Nichrome (NiCr)
Nicel (Ni)

Palladium (Pd)
Platinum (Pt)
Silicon (Si)
Silcon Dioxide (SiO₂)
Silver (Ag)
Tatalum (Ta)
Titanium (Ti)
Titanium Dioxide (TiO₂)
Tungsten (W)

Training: Visit the Equipment & Training Information

Specialty Coating Systems Parylene Thermal Evaporator

The Specialty Coating Systems is a dedicated parylene evaporator that deposits a totally conformal film. Parylene is a chemically inert polymer that has many great electrical, optical, mechanical, and biological properties. Several different types of parylene are stocked.

Coatings

Room Temperature Deposition
Conformal coating
Inert and Chemically Resistant
Clear to Opaque

Applications

Conformal Coating of Printed Circuit Boards for Protection Against Moisture and Corrosion
Surface Passivation and Environmental Protection of Semiconductor Devices
Conformal Coating of Biomedical Devices for Environmental Protection and Electrical Insulation
Parylene has found acceptance in a myriad of industrial, aerospace, chemical, automotive, consumer, pharmaceutical, and defense applications

Materials

Parylene Dimers from Specialty Coating Systems