Equipment & Training Schedule

Equipment List

Technical Contacts

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Characterization

Characterization

Nanofab thin films

Characterization Capabilities

Thin Film

Ellipsometry and other optical techniques

  • Woollam ellispometer
  • NanoMetrics 8000X SE thin film measurement with internal Woolam ellipsometer can measure the thickness of each film in a stack
  • UV-VIS

Film Stress measurement

Film stress can be quickly characterized on whole silicon wafers using the Tencor Flexis 2320 or the Tencor P16+ profilometer.