Spectroscopic Ellipsometer

Woolllam M-2000XF-193 is a focused beam fixed angle ellipsometer. Specs are as follows:

• Fixed incident angle: 65°
• Spot size of 25µm x 60 µm
• Spectral range: 193-1000nm
• Automated mapping stage: 200mmX200mm

Typical applications

• Thin film thickness measurements including a variety of materials, including dielectrics, organics, semiconductors, and even metal layers;
• Measure film as thin as a fraction of a nanometer;
• Measure film thickness upto 50 µm for dielectrics, upto 50 nm for absorbing films like metal;
• Measure film with multilayer of different materials;
• Measure refractive index;
• Mapping thickness uniformity on wafers upto 8”;
• Measure film thickness on patterned samples.