This EDS system is recently installed on Merlin. The combination of large area (100mm2) detector, AZtecLive technology and the capability of continuously tuning beam current to 300nA while reserving high image resolution makes real-time chemical imaging and element mapping an ease.
A new capability, called Aztec LayerProbe can measure thin film thickness in a non-destructive way. Based on the collected chemical information and layered structure provided, the software will simulate based on internal theoretical model then give the thickness information, very similar to ellipsometry. This is going to be a complementary thickness measurement technique to ellipsometry when measuring thick metal films.
The large sensor sizes of Ultim Max ensure maximum counts are achieved under the most demanding conditions, enabling low KV analysis down to 1KV.