March 23, 2017: A Practical Approach to Thin Film Metrology

MCL Workshop with PANalytical March 23

PANalytical/MCL Worshop

A Practical Approach to Thin Film Metrology

Workshop Description

Are you analyzing thin films?  Is thin film x-ray metrology a bottleneck in your production steps?  Did you know that your PANalytical system can automate analysis of your data? Let us give you some useful tips on data collection and analysis using your PANalytical hardware and software programs.

This complimentary one day seminar will include lectures and discussions on sample optimization and analysis best practices for both polycrystalline and epitaxial thin films.  Measurements such as grazing incidence diffraction and reflectometry of polycrystalline films and rocking curves and reciprocal space mapping for epitaxial films will be discussed.  Additionally, there will be a live demonstration of film/wafer alignment on an X’Pert3 MRD using Data Collector software, as well as live software demonstrations of analysis procedures and tips using X’Pert Reflectivity and X’Pert Epitaxy analysis software packages. Advanced analysis techniques, such as film strain, in-plane analysis and Ultra-fast reciprocal space mapping with our PIXcel3D detector, will also be briefly discussed.

Instructor

Mike Hawkridge, PANalytical Aplications Specialist  

Location

MSC Building, Room N201 University Park Campus

Date and Time

March 23, 2017
8:30 a.m.: Coffee/pastry and Check-in
9:00 a.m. - 4:00 p.m.: Workshop

Registration Details

YOU MUST REGISTER IN ADVANCE TO ATTEND THIS WORKSHOP
Space Is Limited! Register through PANalytical's website.
No Cost Compliments of PANalytical, Inc.

Registration Deadline

March 17, 2017

Telephone: 814-865-2328 for further information if needed.

Schedule

8:30 a.m. Check-in & Coffee and Pastries
9:00 a.m. - 9:15 a.m. Welcome
9:15 a.m. - 12:00 p.m.

Polycrystalline Films Section (with 15 minute coffee break)

  • XRR and Reflectivity software
  • Grazing Incidence and HighScore software
  • Thin film texture and stress, in-plane discussion
12:00 p.m. - 1:00 p.m. Catered Lunch
1:00 p.m. - 4:00 p.m.

Epitaxial Film Section (with 15 minute coffee/light snack break)

  • A High Resolution Diffraction Primer
  • Rocking Curves and Coupled Scans, analysis in Epitaxy Software
  • Reciprocal Space Mapping and analysis in Epitaxy Software
4:00 p.m. - 4:30 p.m. Advanced Techniques
4:30 p.m. Workshop Ends