Electron Backscattered Diffractometry (EBSD) is based on automatic indexing of electron backscatter diffraction patterns (EBSP) which can be produced in a properly equipped SEM. EBSD provides a complete description of the crystallographic orientations in polycrystalline materials.
Electron backscatter diffraction patterns (or EBSPs) are obtained in the SEM by focusing the electron beam on a crystalline sample. The sample is tilted to approximately 70 degrees with respect to the horizontal. The diffraction pattern is imaged on a phosphor screen. The image is captured using a low-light CMOS camera. The bands in the pattern represent the reflecting planes in the diffracting crystal volume. Thus, the geometrical arrangements of the bands are a function of the orientation of the diffraction crystal lattice.
EBSD is a powerful tool for investigating of polycrystalline microstructure including: