Equipment

Below is a list of the most popular equipment within the Electrical Characterization Lab. While equipment is often organized into measurement systems, individual specifications are listed for general reference purposes.

Semiconductor Parameter Analyzers

Keithley 4200-SCS

  • 4 (2W) SMUs (2 with preamps)
  • 2 (20W) SMUs
  • Multi-frequency Capacitance Unit (CVU)

Keysight B1500A

  • 4 (2W) Mid Power Source Monitor Unit (MPSMU)
  • 2 (20W) High Power Source/Measure Unit (HPSMU)
  • Multi Frequency Capacitance Measurement Unit (MFCMU)
  • High Voltage Semiconductor Pulse Generator Unit (HV-SPGU)
  • Integrated with Semi-automated probe station for unattended wafer measurements

Probe Stations

Manual

FormFactor 11000B

  • 8” Triaxial chuck
  • Light shielded enclosure
  • Temperature range: -60°K to 300°C
  • Automated temperature sweeping

Cascade Probe Station

  • 8” Triaxial chuck
  • Light shielded enclosure
  • Temperature range: room temperature
  • Integrated with a Keithley 4200 SCS Parameter Analyzer

Semi-Automated

FormFactor 12000KB

  • 8” Triaxial chuck
  • 6 probe manipulators
  • Light shielded enclosure
  • Temperature range: room temperature
  • Integrated with Keysight B1500A for unattended wafer measurements

credit: FormFactor.com

Cryogenic
(with Hall Coefficient & Van der Pauw Measurement System)

Lake Shore CRX-VF
PS-HM-8425 DC Semiautomated Measurement System with Closed Cycle Refrigeration (CCR)

  • +/- 2 T typical (2.5 T max.) vertical field superconducting magnet
  • Temperature range <10°K to 400°K
  • Maximum sample size: 51 mm diameter
  • 6 position Hall Bar measurements
  • Vacuum or Nitrogen atmosphere available at room temp

credit: LakeShore.com