EE 441 – Semiconductor Integrated Circuit Technology
Course Description:
Fundamentals of semiconductor device/integrated circuit technology with emphasis on advanced silicon ICs fabrication and packaging. The course aims to introduce you to the basics of micro- and nanofabrication, cleanrooms, lithography, deposition, etching, process integration, and packaging. These subjects are vital to understanding the manufacturing of semiconductors and a multitude of devices, including MEMS, LEDs, solar cells, and microfluidics. The course will be delivered in person and managed through Canvas (https://psu.instructure.com). All the lectures will be stored in Canvas. Extensive hands-on training will take place at the Nanofabrication Lab cleanroom in the Millennium Science Complex. Students will fabricate MOSFET (metal-oxidesemiconductor field-effect transistor) test devices and then measure their electrical characteristics. Additionally, students will transfer a pattern or image of their choice using a multi-layer process that includes lithography, etching, and lift-off metallization.
Location:
Millennium Science Complex
Course Objectives:
At the conclusion of the course, students will be able to:
- Understand semiconductor manufacturing processes and their limitations.
- Design microfabrication processes for IC.
- Understand wafer bonding techniques and their role in advanced packaging.
- Utilize semiconductor test equipment, including source-measure units and capacitance meters.
- Work effectively in a group to complete laboratory experiments.
- Write a technical laboratory report.
- Use software for process integration and analysis, such as Fabublox.
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