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Multi-Module UHV MBE (MBE 2)


The 2DCC Multi-Module Molecular Beam Epitaxy (MBE) system features in-situ cryogenic ARPES and STM. Samples can be transferred directly into the characterization tools, without exposing them to atmosphere, allowing the properties of pristine surfaces to be studied. This allows us to quickly characterize their inherent properties and rapidly develop and optimize new 2D materials and heterostructures.


  • 2” diameter substrates
  • Adaptor for smaller 1 cm2 substrates
  • Se cracker
  • 6 pocket e-beam source for transition metals (Al, Mo, Nb, Ta, V, W)
  • Effusion cells for Bi, Cr, Fe, Sb, Te
  • Ellipsometry for real-time film growth monitoring
  • Base pressure of 1 x 10-10 Torr
  • In-vacuo cryogenic STM with 4 independent probe tips
  • In-vacuo cryogenic ARPES (energy resolution 1.8 meV at 2 eV pass energy
  • Monochromator with He 1 (21.2 eV) and He 2 (40.8 eV) excitations

Materials to be grown:

  • Topological insulators Bi2Se3, (Bi,Sb)2Te3
  • TMDs MoSe2, MoTe2, NbSe2, WSe2, WTe2, etc…
  • FeSe
  • Various heterostructures