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Nanofabrication Lab

Nanofabrication Laboratory to MSC Move Timetable

Key

Instrument Offline
and In Transit to MSC
Online in MSC

If you have an questions regarding the move of the below equipment, please contact Bill Mansfield at wmm14@psu.edu


This document was last updated on Monday, May 21, 2012.


Download the Nanofab Move Schedule (PDF)


Penn State MSC Nanofab Orientation for Current Users

As you are all well aware, the transition from the current Penn State Nanofab facilities to the new MSC cleanroom is underway. Processing tools in the NNIN network located in three facilities (MRI, MRL-Keck/SMIL, EEW) have begun to be moved. The move will last thru July/August 2012. During that time period there will be tools operating in multiple facilities including the new MSC Nanofab cleanroom. Current users who have already undergone safety and equipment training will not be required to repeat Safety or tool training on tools they are already certified on but will have to undergo Cleanroom Orientation for the new MSC cleanroom facility and be trained on new tools. (examples of new tools include the new wet benches, lithography benches, lithography tracks, new GCA stepper, new e-beam system, new Thermco LPCVD / Oxidation System, etc.). In order to expedite user access to the tools in the new MSC cleanroom as they come on-line, the Nanofab staff is implementing an MSC Cleanroom Orientation for current users.


To schedule an orientation of the new cleanroom facility, please contact Jaime Reish (jdr15@psu.edu) and accommodations will be made depending on the availability of the staff.


Lithography Bench Training

The Lithography Bench training for the MSC Cleanroom is for user's who already have access to the old Lithography Benches in the MRI Cleanroom. The transition from the current Penn State Nanofab facilities to the new MSC cleanroom is underway. In order to access the new Lithography Benches you must attend training for this. Training sessions will be offered on Tuesdays & Wednesdays each week and will run until July 31st. Registrants should arrive in the Gowning area of the MSC Cleanroom at least five minutes prior to the scheduled start of the session.


To schedule Lithography bench training, visit: http://www.doodle.com/nn5z5nw6sb4mamdh


Vistec EBPG 5200 (Ebeam) Training Sessions

The installation of the new Vistec EBPG 5200ES is almost complete, and in order to access the new Vistec EBPG 5200ES (Ebeam) tool you must attend training. There will be a classroom factory training session for current Ebeam tool users on Wednesday, May 23rd from 9 am - 12 pm in N-201 MSC building. After completing the class room session you will need to register and attend a hands on training session which will be held on Wednesday, May 23rd or Thursday, May 24th. There is no fee for the factory and hands on training sessions for current Ebeam users. Registrants for the hands on training sessions should arrive in the Gowning area of the MSC Cleanroom at least five minutes prior to the scheduled start of the session. After completing these two sessions you will need to contact Chad Eichfeld for the final training on the Vistec EBPG 5200ES.


Classroom Session (Required 1st Training)

Wednesday, May 23rd (9:00 a.m. - 12:00 p.m.): Register Now!

Meet in N-308A & B Millennium Science Complex


Hands-on Training Session (Required 2nd Training)

Wednesday, May 23rd OR Thursday, May 24th: Register now!

Meet in the MSC Cleanroom Gowning Area