SEM Instrumentation
Hitachi S-3500N (MRL Bldg.)
- high and low vacuum operation
- backscatter electron detector
- energy dispersive x-ray (EDS)
- orientation imaging microscopy (OIM)
Hitachi S-3000H (MRL Bldg.)
- secondary electron imaging
FEI Quanta 200 (Hosler Bldg.)
- environmental SEM technology
- secondary electron detector
- energy dispersive x-ray (EDS)
- backscatter electron detector
- +5° to 1,000°C temperature controlled stage
Download training manual (18 MB).
FEI Philips XL-20 (Hosler Bldg.)
- energy dispersive x-ray (EDS)
- backscatter electron detector
JEOL 6700F (Hosler Bldg.)
- field emission based instrument
- secondary electron detector
- backscatter electron detector
Download training manual (3 MB).
Download beam alignment procedure (10k).
Specifications
- Accelerating voltage: 1-30 kV
- Lateral resolution: 1 nm (FE-SEM); 3.5 nm (ESEM and SEM)