SEM Instrumentation
Hitachi S-3500N SEM wtih EDS and OIM (174 MRL Building)
- high and low vacuum operation
- backscatter electron detector
- energy dispersive x-ray (EDS)
- orientation imaging microscopy (OIM)
Hitachi S-3000H SEM(175 MRL Building)
- secondary electron imaging
FEI Philips XL-20 SEM (6/7 Hosler Building)
- energy dispersive x-ray (EDS)
- backscatter electron detector
FEI Quanta 200 ESEM (6/7 Hosler Building)
Click here to review the operating instructions for this instrument.
- environmental SEM technology
- secondary electron detector
- energy dispersive x-ray (EDS)
- backscatter electron detector
- +5° to 1,000°C temperature controlled stage
- lateral resolution: 3.5 nm
JEOL 6700F FE-SEM (6/7 Hosler Building)
Click here to review the operating instructions for this instrument.
Click here to review the beam alignment procedure for this instrument.
- field emission based instrument
- secondary electron detector
- backscatter electron detector
- lateral resolution: 1 nm