SEM Instrumentation
Hitachi S-3500N SEM wtih EDS and OIM (N030A MSC Bldg)
- high and low vacuum operation
- backscatter electron detector
- energy dispersive x-ray (EDS)
- orientation imaging microscopy (OIM)
Hitachi S-3000H SEM (N030A MSC Bldg)
- secondary electron imaging
FEI Philips XL-20 SEM (6/7 Hosler Building)
- backscatter electron detector
FEI Quanta 200 ESEM (N030K MSC Bldg)
Click here to review the operating instructions for this instrument.
- environmental SEM technology
- secondary electron detector
- energy dispersive x-ray (EDS)
- backscatter electron detector
- +5° to 1,000°C temperature controlled stage
- lateral resolution: 3.5 nm
FEI NanoSEM 630 FESEM (N030K MSC Bldg)
- High spatial resolution: 1.6nm resolution at 1kV
- Stage for large (>6 in) specimens
- -10° to 60° tilt
- Variable pressure (VP) pumping for imaging uncoated insulating and life-science specimens (Figs. 1-2)
- Beam deceleration™ for enhanced contrast in insulating specimens
- Elemental mapping via the Oxford AZtec™ energy dispersive spectrometry (EDS) system capable of detecting elements down to Boron (available in December 2011)