EPMA Instrumentation
Cameca SX-50
- equipped with 4 wavelength spectrometers and one energy dispersive spectrometer.
- stage and beam scanning for elemental and modal distribution maps.
- secondary electron (SE), backscattered electron (BSE), absorbed current, and cathodoluminescent images.
- Sun workstation (UNIX) for hardware and data manipulation.
Specifications
- Accelerating voltage: up to 30 keV
- Sampling volume: 1-2 μm3
- Elements detected: B-U
- Detection limit: 100 to 200 ppmw