Skip Navigation
Penn State
NNIN at Penn State

NON-ACADEMIC FEES

NNIN at Penn State Fee Schedule
Location
Non-Academic Rates
 
per hour unless indicated otherwise
Cleanroom Access
MRI Cleanroom (Daily Entrance Fee)
$45.90
Keck Cleanroom (Hourly Rate)
$40.79
EE West Cleanroom (Daily Entrance Fee)
$45.90
Photolithography
Litho Bench Left (Preparation Clean Bench I)
MRI
$45.90
Litho Bench Right (Preparation Clean Bench II)
MRI
$45.90
Litho Bay
Keck
included in $40.79/hour cleanroom rate
Karl Suss MJB3 Contact Aligner
MRI
$45.90
Karl Suss MJB3 Contact Aligner
Keck
included in $40.79/hour cleanroom rate
Karl Suss MA6 Contact Aligner
MRI
$76.50
Heidelberg DLW66 Laser Writer
MRI
$91.80
Molecular Imprints Imprio 55 Nanoimprinter
MRI
$183.60
Leica EBPG5-HR E-beam
MRI

$306.00/hr for up to 2 hrs

$76.50/hr for add'l time >2 hrs

GCA 8000 i-Line Stepper
MRI
$153.00
L-Edit Mask Design
MRI
$18.36
OAI Deep UV Flood Exposure
MRI
$30.60
Photomasks Click here for pricing
Wet Benches
Acid/Base Poly Bench I & II
MRI
$45.90
Solvent Stainless Steel Bench I & II
MRI
$45.90
Beco Bench (Deep Silicon Wet Etching)
MRI
$61.20
SC1/SC2 Bench (RCA Wafer Clean)
MRI
$61.20
Spin Rinse Dryer - General
MRI
$15.30
Thin Film Deposition
Semicore Electron-beam Evaporator (per run)
MRI
$137.70
Kurt Lesker Thermal and Electron-beam Evaporator (per run)
MRI
$128.52
Spec Coatings Thermal Evaporator - Paralyene (per run)
MRI
$128.52
Electroplating System (Technic Inc.)
MRI
$45.90
Kurt Lesker CMS-18 DC/RF Sputtering (per hour)
Keck
$71.39
FEI Dual Beam Focusing Ion Beam (per hour)
MRI
$203.99
Chemical Vapor Deposition
MRL LPCVD Silicon Nitride
MRI
$137.70
MRL LPCVD Low Temperature Oxide
MRI
$137.70
MRL LPCVD Polysilicon
MRI
$137.70
Applied Materials PECVD Dielectric
MRI
$91.80
Applied Materials PECVD Liquid Precursor
MRI
$91.80
Trion Technologies ICP PECVD Dielectric
EEW
$76.50
Cambridge Nanotech ALD Dielectric (per run)
MRI
$153.00
Thermal Processing
Dry Oxidation Furnace
MRI
$122.40
Wet Oxidation Furnace
MRI
$122.40
MRL (Black Max) Annealing Furnace
MRI
$107.10
N-type Diffusion Furnace
MRI
$122.40
P-type Annealing Furnace
MRI
$122.40
Lindberg Blue M Annealing Furnace
MRI
$76.50
Spin-on Dielectric Curing BCB Oven
MRI
$45.90
Rapid Thermal Processing
Keck
included in $40.79/hour cleanroom fee
Rapid Thermal Annealing System
MRI
$137.70 ($61.20 min. charge)
Dry Etching
M4L Plasma Surface Modification
MRI
$36.72
Plasma Therm 720 - Cl & F
MRI
$61.20
Trion Technologies ICP RIE - Cl & F
MRI
$45.90
Applied Materials MERIE Dielectric
MRI
$67.32
Alcatel Deep RIE Silicon (EEW)
EEW
$168.30
Xactix XeF2 Etcher
EEW
$153.00
Technics Micro RIE - O2 & F
Keck
included in $40.79/hour cleanroom fee
Ion Mill (per run)
Keck
$61.20
Tegal 6500 HRe Cluster Etch System
MRI
$153.00 ($76.50 min. charge)
Chemical Nanofabrication
Glove Box for Self Assembled Monolayer Deposition
MRI
$76.50
PDMS Processing Bench
MRI
no charge
Smart Materials Processing (full lab access)
$36.72/hr for access
UHT MP4150 Ceramic Punch
Keck
Carver Heated Platen Press
Keck
Carsten Tape Caster
Keck
Audion Vacuum Sealer
Keck
PTC ceramic cutter
Keck
Mettler balance
Keck
Presco/AMI Screen Printer 645
Keck
Nicon profile projector V-12
Keck
Schneeider & Marguard Ceramic Punch
Keck
RTC Three Zone Infrared Belt Furnace
Keck
New Long Screen Printer
Keck
PTC Isostatic Laminator 4004
Keck
PTC Isostatic Laminator 4012
Keck
Thinky Rotation/Revolution Mixer
Keck
Optical Microscope w/Motic Digital Camera
Keck
Tencor Profilometer
Keck
Process Inspection
Leitz Optical Microscope I
MRI
no charge
Leitz Optical Microscope II
MRI
no charge
Leica Optical Microscope II
Hosler
no charge
Enviromental Scanning Electron Microscope
Hosler
$101.99
JEOL Field Emission Scanning Electron Microscope 6700F
Hosler
$101.99
LEO 1530 Field Emission Scanning Electron Microscope
MRI
$122.40
Sputter Coater for Scanning Electron Microscope
MRI
no charge
Process Analysis
CV/IV Station
MRI
$45.90
Four Point Probe
MRI
$45.90
Cryogenic Electronic Test Station (DLTS)
MRI
$45.90
Gaertner Ellipsometer
MRI
$45.90
Nanospec Ellipsometer
MRI
$45.90
Woollam Ellipsometer
EEW
$61.20
Tencor 500 Profilometer (Nanofab)
MRI
$45.90
Wyko Profilometer
MRI
$102.01
Tencor Surfscan 4500 Surface Partical Inspection Analyzer
MRI
$76.50 ($30.60 min. charge)
Tencor Flexis 2320
MRI
$107.10
Nanometrics 8000X SE
MRI
no charge
Chemical Nanostructure Analysis
Witec NSOM/Raman
MRI
$203.99
Omicron NSOM/AFM
MRI
$153.00
Atomic Force Microscopy
Hosler
$101.99
Atomic Force Microscopy
MRL
$101.99
JEOL AFM/STM 4500
MRI
$153.00
Bruker Fourier Transform Infrared Spectrometer
MRI
$203.99
Field Emission Auger Electron Spectrosopy
MRI
$203.99
X-ray Photoelectron Spectroscopy
MRI
$203.99
Philips Pro MRD 4-Circle XRD
MRI
$102.01
Staff Time and Training
Staff Time (assisted operation, remote operation and time outside lab, ie: meetings, telecons, email, etc.)
$90.27
New Fab User Orientation/Safety Training
$191.25
Annual Recertification Training   $76.50
Training
per equipment
PZT
PZT Coating less than or equal to 1um
Keck
$563.54
PZT Coating greater than 1um
Keck
$1,127.09
PZT solution 120 ml of .4 M Mn-PZT 30/70
Keck
$795.58
PZT solution 120-150 ml of 0.2 M LaNiO3 (LNO)
Keck
$507.44
PZT solution 120 ml of 0.4 M PZT 52/48
Keck
$780.28