NON-ACADEMIC RATES
Nanofabrication Facility/NNIN Rate Schedule |
Location |
Non-Academic Ratesper hour unless indicated otherwise |
| Cleanroom Access | ||
| MRI Cleanroom (Daily Entrance Fee) | $46.20 | |
| Keck Cleanroom (Hourly Rate) | $41.06 | |
| EE West Cleanroom (Daily Entrance Fee) | $46.20 | |
| Photolithography | ||
| Litho Bench Spinner I and II | MRI |
$46.20 |
| Litho Bench Develop I and II | MRI |
$46.20 |
| Litho Bay | Keck |
included in $41.06/hour cleanroom rate |
| Karl Suss MJB3 Contact Aligner | MRI |
$46.20 |
| Karl Suss MJB3 Contact Aligner | Keck |
included in $41.06/hour cleanroom rate |
| Karl Suss MA6 Contact Aligner | MRI |
$77.00 |
| Heidelberg DLW66 Laser Writer | MRI |
$92.40 |
| Molecular Imprints Imprio 55 Nanoimprinter | MRI |
$184.80 |
| Leica EBPG5-HR E-beam | MRI |
$308.00/hr for up to 2 hrs $77.00/hr for add'l time >2 hrs |
| GCA 8000 i-Line Stepper | MRI (Sept 2007) |
$154.00 |
| L-Edit Mask Design | MRI |
no charge |
| OAI Deep UV Flood Exposure | MRI |
$30.80 |
| Photomasks | Click here for pricing | |
| Wet Benches | ||
| Acid/Base Poly Bench I & II | MRI |
$46.20 |
| Solvent Stainless Steel Bench I & II | MRI |
$46.20 |
| Beco Bench (Deep Silicon Wet Etching) | MRI |
no charge |
| SC1/SC2 Bench (RCA Wafer Clean) | MRI |
$61.60 |
| Spin Rinse Dryer - General | MRI |
$15.40 |
| Thin Film Deposition | ||
| Semicore Electron-beam Evaporator (per run) | MRI |
$138.60 |
| Kurt Lesker Thermal and Electron-beam Evaporator (per run) | MRI |
$129.36 |
| Spec Coatings Thermal Evaporator - Paralyene (per run) | MRI |
$129.36 |
| Electroplating System (Technic Inc.) | MRI |
$46.20 |
| Kurt Lesker CMS-18 DC/RF Sputtering (per hour) | Keck |
$71.86 |
| FEI Dual Beam Focusing Ion Beam (per hour) | MRI |
$205.33 |
| Kurt Lesker Lab-18 Thermal and Ebeam Evaporator | MRI |
$117.04 |
| Chemical Vapor Deposition | ||
| MRL LPCVD Silicon Nitride | MRI |
$138.60 |
| MRL LPCVD Low Temperature Oxide | MRI |
$138.60 |
| MRL LPCVD Polysilicon | MRI |
$138.60 |
| Applied Materials PECVD Dielectric | MRI |
$92.40 |
| Applied Materials PECVD Liquid Precursor | MRI |
$92.40 |
| Cambridge Nanotech ALD Dielectric (per run) | MRI |
$154.00 |
| Thermal Processing | ||
| Dry Oxidation Furnace | MRI |
$123.20 |
| Wet Oxidation Furnace | MRI |
$123.20 |
| MRL (Black Max) Annealing Furnace | MRI |
$107.80 |
| N-type Diffusion Furnace | MRI |
$123.20 |
| P-type Annealing Furnace | MRI |
$123.20 |
| Lindberg Blue M Annealing Furnace | MRI |
no charge |
| Spin-on Dielectric Curing BCB Oven | MRI |
no charge |
| Rapid Thermal Processing | Keck |
included in $41.06/hour cleanroom rate |
| Rapid Thermal Annealing System | MRI |
$138.60 ($61.60 min. charge) |
| Dry Etching | ||
| M4L Plasma Surface Modification | MRI |
$36.96 |
| Plasma Therm 720 - Cl & F | MRI |
$61.60 |
| Applied Materials MERIE Dielectric | MRI |
$67.76 |
| Alcatel Deep RIE Silicon (EEW) | EEW |
$169.40 |
| Xactix XeF2 Etcher | EEW |
$154.00 |
| Technics Micro RIE - O2 & F | Keck |
included in $41.06/hour cleanroom rate |
| Ion Mill (per run) | Keck |
$61.60 |
| Tegal 6500 HRe Cluster Etch System | MRI |
$154.00 ($77.00 min. charge) |
| Plasma Therm Versalock Dual Etch | MRI |
$95.48 |
| Chemical Nanofabrication | ||
| Glove Box for Self Assembled Monolayer Deposition | MRI |
no charge |
| PDMS Processing Bench | MRI |
no charge |
| Smart Materials Processing (full lab access) | $36.96/hr for access | |
| UHT MP4150 Ceramic Punch | Keck |
included in above lab fee |
| Carver Heated Platen Press | Keck |
included in above lab fee |
| Carsten Tape Caster | Keck |
included in above lab fee |
| Audion Vacuum Sealer | Keck |
included in above lab fee |
| PTC ceramic cutter | Keck |
included in above lab fee |
| Mettler balance | Keck |
included in above lab fee |
| Presco/AMI Screen Printer 645 | Keck |
included in above lab fee |
| Nicon profile projector V-12 | Keck |
included in above lab fee |
| Schneeider & Marguard Ceramic Punch | Keck |
included in above lab fee |
| RTC Three Zone Infrared Belt Furnace | Keck |
included in above lab fee |
| New Long Screen Printer | Keck |
included in above lab fee |
| PTC Isostatic Laminator 4004 | Keck |
included in above lab fee |
| PTC Isostatic Laminator 4012 | Keck |
included in above lab fee |
| Thinky Rotation/Revolution Mixer | Keck |
included in above lab fee |
| Optical Microscope w/Motic Digital Camera | Keck |
included in above lab fee |
| Tencor Profilometer | Keck |
included in above lab fee |
| Process Inspection | ||
| Leitz Optical Microscope I | MRI |
no charge |
| Leitz Optical Microscope II | MRI |
no charge |
| Leica Optical Microscope II | Hosler |
no charge |
| Nikon L200ND Optical Microscope | MRI |
no charge |
| Enviromental Scanning Electron Microscope | Hosler |
$102.66 |
| JEOL Field Emission Scanning Electron Microscope 6700F | Hosler |
$102.66 |
| LEO 1530 Field Emission Scanning Electron Microscope | MRI |
$123.20 |
| Sputter Coater for Scanning Electron Microscope | MRI |
no charge |
| Process Analysis | ||
| CV/IV Station | MRI |
$46.20 |
| Four Point Probe | MRI |
no charge |
| Cryogenic Electronic Test Station (DLTS) | MRI |
$46.20 |
| Gaertner Ellipsometer | MRI |
$46.20 |
| Nanospec Ellipsometer | MRI |
$46.20 |
| Tencor 500 Profilometer (Nanofab) | MRI |
$46.20 |
| KLA-Tencor P16+ Profilometer | MRI |
$46.20 |
| Wyko Profilometer | MRI |
$102.66 |
| Tencor Surfscan 4500 Surface Partical Inspection Analyzer | MRI |
$77.00 ($30.80 min. charge) |
| Tencor Flexis 2320 | MRI |
$107.80 |
| Nanometrics 8000X SE | MRI |
$46.20 ($30.80 min. charge) |
| Chemical Nanostructure Analysis | ||
| Witec NSOM/Raman | MRI |
$205.33 |
| Omicron NSOM/AFM | MRI |
$154.00 |
| Atomic Force Microscopy | Hosler |
$102.66 |
| JEOL AFM/STM 4500 | MRI |
$154.00 |
| Bruker Fourier Transform Infrared Spectrometer | MRI |
$205.33 |
| Field Emission Auger Electron Spectrosopy | MRI |
$205.33 |
| X-ray Photoelectron Spectroscopy | MRI |
$205.33 |
| Staff Time | ||
| Staff Assisted Operation | $90.86 | |
| PZT | ||
| PZT Coating less than or equal to 1um | Keck |
$567.23 |
| PZT Coating greater than 1um | Keck |
$1,134.46 |
| PZT solution 120 ml of .4 M Mn-PZT 30/70 | Keck |
$800.78 |
| PZT solution 120-150 ml of 0.2 M LaNiO3 (LNO) | Keck |
$510.76 |
| PZT solution 120 ml of 0.4 M PZT 52/48 | Keck |
$785.38 |
| Training | Session #1 |
Session #2 & #3 |
| Alcatel SDRIE Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Alcatel Oxide DRIE Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| ALD Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| AMAT Cluster Tool Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| AMAT MERIE Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Black Max MRL Anneal Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| CV/IV Station Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| DWL66 Laser Writer Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Electroplating Training | $77.00 | 1-Part Session Only |
| Ellipsometer Training | $77.00 | 1-Part Session Only |
| FESEM Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Kurt Lesker Evaporator Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Lab-18 Evaporator Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Litho Intro/MABA6 Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| LPCVD 3 Stack Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| M4L Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| MJB3 Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Parylene Coater Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| PlasmaTherm 720 RIE Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| PlasmaTherm Versalock Etch Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Profilometer Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| RTA Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Semicore Evaporator Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Soft Lithography Training | $77.00 | 1-Part Session Only |
| Tegal 6500 Etch Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Tencor Flxs Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Wet Bench Training | $77.00 | 1-Part Session Only |
| Xactix Etcher Training | $77.00 | Staff Time + Equipment Time hourly Rates |
| Nikon L200ND Microscope Training | no charge | 1-Part Session Only |
| DUV Flood Training | $15.40 | Staff Time + Equipment Time hourly Rates |
| Litho Bench/Spin Training | $38.50 | Staff Time + Equipment Time hourly Rates |
| Nanometrics 8000X Training | $38.50 | Staff Time + Equipment Time hourly Rates |
| Imprio Training | $154.00 | Staff Time + Equipment Time hourly Rates |
| GCA8000 Stepper Training | $192.50 | Staff Time + Equipment Time hourly Rates |
| Safety Training/Orientation | $192.50 | 1-Time Flat Fee Only |
| Ebeam Training | $308.00 | 1-Time Flat Fee Only |
| Sputterer Training | Staff Time + Equipment Time hourly Rates (~2 hrs) | Staff Time + Equipment Time hourly Rates |
