CHEMICAL NANOFABRICATION & CHARACTERIZATION EQUIPMENT
PHILIPS PRO MRD 4-CIRCLE HIGH RESOLUTION X-RAY DIFFRACTION SYSTEM
Equipment Configuration
- Manufacturer: Philips Analytical X-ray, The Netherlands (currently PANalytical)
- Source: Cu Ka
- Goniometer: Fully automated High Resolution (ω and 2Ө axes can be stepped by 0.0002˚). 4-circle (ω, 2Ө, sample tilt and rotation axes) with XYZ translation.
- Incident Optics: Line focus mirror/monochromator provides Ka1 with <20arcsec angular divergence; Line focus mirror for parallel beam applications; Line focus programmable divergence slit with soller slits for B-B parafocusing; Multi capillary lens for point focus parallel beam applications.
- Receiving Optics: Rocking curve slits; Bonce-Hart triple axis; Parallel Plate Collimators of varying sizes
- Angular range: -4 to 165˚ 2
- Applications and Accessories: This is an excellent instrument for X-ray scattering experiments on nearly perfect semi-conductor material structures and other single crystal films on single crystal substrates. High resolution rocking curves and 2D or 3D reciprocal space maps can be acquired from such materials. Lesser quality single crystal and polycrystalline films can also be studied with appropriate optic selection. This versatile instrument is also capable of X-ray Reflectivity, In-Plane Diffraction, Stress and Texture studies. A 900˚ C domed heating stage can be used in many 4-circle experiments.
- Analyses: Software is available forrocking curveanalysis for epi-film strain, mismatch, relaxation, composition and thickness based on dynamic scattering theory and simulations. Residual stress, texture analysis, XRR simulation and fitting and more functions are also supported with commercial software products.
- Sample Preparation: Please consult the MCL staff for appropriate sample forms and sizes.
Description
X-ray Diffraction is an analytical technique that utilizes an inherent property of the x-ray beam – the wavelength - and the laws of physics that determine how that beam interacts with matter to characterize materials. Classically, the technique has been applied primarily to well-ordered crystalline materials to determine crystal structures, identify phase composition, measure stress, preferred orientation and crystallinity, but the field is rapidly expanding into the characterization of non- or semi-crystalline materials such as polymers, nanoparticles, and biological materials. Scattering experiments at very small angles can study electron density structures in materials on size scales greater than the electron density contrast due to atomic ordering observed in diffraction from crystalline materials and can provide information on size, shape, and distribution of electron density contrasted domains in polymers, dilute suspensions, gels, emulsions and more (SAXS). Diffuse scattering to wide angles can study atomic structure in non-crystalline materials. Pair distribution and radial distribution analysis are examples of this type of scattering experiment.
