CHEMICAL NANOFABRICATION & CHARACTERIZATION EQUIPMENT
WET CHEMICAL PROCESSING
Equipment Configuration
The dedicated wet bench area which contains a variety of chemicals allows for extensive wet chemical processing.
Acid/Base Poly 1
Acid/Base Poly 2
Solvent Stainless Steel 1
Solvent Stainless Steel 2
Beco Etch Station
This specialized wet station was designed for TMAH and KOH etching. PID heating control, in-line filtering, and an all-teflon wetted pump work together to tightly control the process parameters.
Spin Rinse Dryers - General and non-metal
SC1/SC2 Wet Process Station
This station houses chemical tanks and dump-rinses used for the RCA/Standard cleaning process. Single samples up to full cassettes of 6" wafers can be cleaned for subsequent processing. RCA 1 / SC1, RCA 2 / SC2, HF, Pirhana, and Spin Rinse Dryers are available.
Available Chemicals
Acids
- Acetic Acid Glacial
- BOE (Buffered Oxide Etch) 10:1
- BOE (Buffered Oxide Etch) 6:1
- Citric Acid
- HydrobromicAcid
- Hydrochloric Acid
- Hydrofluoric Acid
- Nitric Acid
- Phosphoric Acid
- Sulfuric Acid
Bases
- Ammonium Fluoride
- Ammonium Hydroxide
- Hydrogen Peroxide
- Potassium Hydroxide
- Sodium Hydroxide
- TMAH (Tetra-methyl Ammonium Hydroxide)
Solvents
- Acetone
- Branson EC (Electronic Cleaner)
- Chlorobenzene
- Ethylene Glycol
- Methyl Ethyl Ketone
- Methyl Iso-butyl Ketone
- Methylene Chloride
- Propanol
- Toluene
- Xylene
Etchants
- Chromium Etch
- Gold Etch
- Nickelex Etch
Lithography
- AZ 400K Developer
- HMDS (Hexamethyl-Disilazane) Adhesion Promoter
- MF312 Shipley Developer
- Nanostrip (Piranha)
- NFR-012 Photoresist
- NMD-3
- SAL 605 Negative E-Beam Resist
- Shipley 500 Series Photoresist
- Shipley 1800 Series Photoresist
- Shipley 3000 Series Photoresist
- SU-8 Thinner
- SU-8 Developer
- SU-8 Negative E-Beam & Photoresist
- 1165 Shipley Photoresist Remover
- 300F Spin on glass
- 3% PMMA in Anisol
- 6% PMMA in Anisol
- FOx -12 (HSQ) negative e-beam resist
Available Transene Etchants
| Chrome Etch 1020 | Nickel Etch Type 1 |
| Gold Etch TFA | Nickel Etch TFB |
| Silver Etch TFS | Titanium Etch TFTN |
Transene Chemical Etchant Information (Etch Rates, etc.)
Etchant/Metal Compatibility Information
(Courtesy of Transene Company, Inc.)
Training
Training - Every Tuesday 2:30 pm - 3:30 pm
