CHARACTERIZATION EQUIPMENT
KLA-TENCOR SURFSCAN 4500 SURFACE PARTICLE INSPECTION ANALYZER
The Surfscan 4500 measures the size, number, and location of wafer particles with scattering cross-sections from .006 um2 to 1024 um2. It features a robotic substrate transporter and optional indexer configurations.
Features include:
System sensitivity, measured with latex spheres on a bare silicon wafer, is 0.2 um diameter.
Non-contaminating wafer transport.
Patented elliptical mirror detection system maximizes the collection of scattered light while minimizing noise from background light.
Overload protection.
Substrate diameters: 2-inch, 3-inch, 100 mm, 125 mm, an 150 mm.
Better than 1% count accuracy as measured on a VLSI Standard's relative standard.
Automated Cassette to cassette operation.
Substrate thicknesses from 0.3 to 0.75mm.
Identifies particle locations and sizes.
Displays and prints color coded wafer maps.
Training
As needed.
