CHARACTERIZATION EQUIPMENT

KLA-TENCOR ALPHASTEP 500 PROFILOMETERS

The Tencor 500 is a computer controlled surface profiler used to measure surface roughness and step heights.

Currently can measure step heights as small as 20 angstroms. With the addition of an air table, steps less than 5 angstroms can be measured.

Uses a stylus with a radius 12.5 um to profile the surface

Stylus-based surface profiler adjustable between 1 and 100mg
Measure deposition thicknesses and etch depths.
Computer controlled Scanning and data collection
Comprehensive data analysis software
Application-specific recipes easily programmed
High resolution VGA monitor
Zoom optics with magnification up to 210x
Multi-scan average mode scans up to 10 times and then averages the scan before print out
Powerful Data Analysis w/ up to 30 standard surface parameters selections
Accurate Surface Characteristic Measurement w/ resolution to 1A
2D step height metrology profiling with 10Å (1s) or 0.1% repeatability
Step height metrology range from below 50 nm to 300 µm