THIN FILM DEPOSITION EQUIPMENT
SEMICORE E-GUN/THERMAL EVAPORATOR
Equipment Configuration
This robust evaporator incorporates a 4-pocket E-beam source as well as a Thermal source for multiple material deposition. System control is semi-automated, and the vacuum is provided by a large cryo-pump and dry roughing pump. A planetary sample mounting set can handle small samples through 6" wafers. There is also a special holder for the lift-off process. Chamber/sample heating is also available.
Sources
- Electron Beam (4 Crucible Pockets)
- Thermal/Resistive (1 set of posts)
Components
- Chamber/Sample Heating (Heat Lamps)
- Quartz Crystal Thickness/Rate Monitor
Sample Mounting
- Planetary Mounts (Conformal Coating)
- 25 - 3 inch wafers
- 8 - 4 inch wafers
- 6 - 6 inch wafers (2 planetary) - cross drilled enabling the mounting of small parts
- Lift-off Mount (Non-Conformal Coating)
Features/Details
- Pump Package
Ebara Cryo-Pump and Ebara A10 Dry Roughing Pump
- Average Pump Down (Atmosphere - 1x10-6) 1.5 hours
Chamber heating decreases pump down time
- Average Total Run Time - 4 hours
Dependent on the amount of material being deposited
- Additional Feed-throughs for accessories
- Viewport allows monitoring of crucibles/boats during the evaporation process
- Automated deposition controller
Available Materials for Deposition
| Alumina | Germanium | Silicon |
| Aluminum | Gold | Silver |
| Chromium | Gold/Ge | SiO2 |
| Cobalt | Iron | Titanium |
| Copper | Nickel | Others upon review |
| Erbium | Platinum |
Training
Training - Every Thursday 1:00 pm - 5:00 pm
