CHARACTERIZATION EQUIPMENT
LEO 1530 FIELD EMISSION SCANNING ELECTRON MICROSCOPE
Equipment Configuration
The Leo 1530 Field Emission Scanning Electron Microscope is a fully software controlled high resolution SEM, located within the Nanofab cleanroom. It uses a thermal field emitter source with operating voltages ranging from 200 eV to 30 kV. The specially designed GEMINI column featuring a beam booster (which makes the beam run faster than it is supposed to be to reduce the beam sensitivity to stray magnetic fields at lower operating voltage) and a beam path with no intermediate cross-over delivers high resolution performance over the entire accelerating voltage range. The low voltage operation often allows imaging non-conductive samples without the need of conductive coating. The system has an annular Inlens secondary electron detector (giving better resolution) in addition to the conventional Everhart-Thornley detector. The system is also capable of backscattered electron (BSE) imaging with an annular BSE detector (Robinson). The sample stage can take samples of a wide variety of sizes and shapes. Typical samples are flat substrates but samples up to 5cm in depth and 6 inches in diameter can be handled. A vacuum electrical port can accept coaxial or 15-pin D connectors for in-situ experiments.
Details
- Schottky field-emission electron source
- Operating voltage: 0.2 - 30 kV
- Rated resolution:1.2 nm at 20 kV , 2.5 nm at 5 kV, and 3 nm at 1 kV
- Detectors: Inlens and Everhart-Thornley secondary electron detectors and Robinson BSE detector
- Capable of handling up to whole 6 inch wafers
- Electron optics fully computer controlled by the friendly LEO-32 software
Training
Training - Every Wednesday 9:00 am - 12:00 pm
