THIN FILM DEPOSITION EQUIPMENT
KURT LESKER E-GUN/THERMAL AND ELECTRON BEAM EVAPORATOR
Equipment Configuration
Sources
- Electron Beam (4 Crucible Pockets)
- Thermal/Resistive (3 sets of posts)
Components
- Quartz Crystal Thickness/Rate Monitor
Sample Mounting
- Lift-off Mount (Non-Conformal Coating)
- Single wafer mount for 3", 4" and 6"
Features/Details
- Manual pumping controls
- Dry Pumping Package
CTI Cryo-Pump and Edwards XDS Dry Scroll Roughing Pump
- Average Pump Down (Atmosphere - 1x10-6) 1 hour
- Average Total Run Time - 3 hours
- Long throw with line-of-sight for excellent lift-off results
Dependent on amount of deposition
- Sample shutter
- Additional feed-throughs
- Viewport to monitor sources before deposition
Materials Processed
| Alumina | Germanium | Silicon |
| Aluminum | Gold | Silver |
| Chromium | Gold/Ge | SiO2 |
| Cobalt | Iron | Titanium |
| Copper | Nickel | Others upon review |
| Erbium | Platinum |
Training
Training - Every Wednesday 1:00 - 5:00 pm
