ACADEMIC FEES
NNIN at Penn State Fee Schedule |
Location |
Academic Rates |
| per hour unless indicated otherwise | ||
| Cleanroom Access | ||
| MRI Cleanroom (Daily Entrance Fee) | $15.00 | |
| Keck Cleanroom (Hourly Rate) | $15.00 | |
| EE West Cleanroom (Daily Entrance Fee) | $15.00 | |
| Photolithography | ||
| Litho Bench Left (Preparation Clean Bench I) | MRI |
$15.00 |
| Litho Bench Right (Preparation Clean Bench II) | MRI |
$15.00 |
| Litho Bay | Keck |
included in $15/hour cleanroom rate |
| Karl Suss MJB3 Contact Aligner | MRI |
$15.00 |
| Karl Suss MJB3 Contact Aligner | Keck |
included in $15/hour cleanroom rate |
| Karl Suss MA6 Contact Aligner | MRI |
$25.00 |
| Heidelberg DLW66 Laser Writer | MRI |
$30.00 |
| Molecular Imprints Imprio 55 Nanoimprinter | MRI |
$60.00 |
| Leica EBPG5-HR E-beam | MRI |
$100.00/hr for up to 2 hrs $25/hr for add'l time >2 hrs |
| GCA 8000 i-Line Stepper | MRI (Sept 2007) |
$50.00 |
| L-Edit Mask Design | MRI |
$6.00 |
| OAI Deep UV Flood Exposure | MRI |
$10.00 |
| Photomasks | Click here for pricing | |
| Wet Benches | ||
| Acid/Base Poly Bench I & II | MRI |
$15.00 |
| Solvent Stainless Steel Bench I & II | MRI |
$15.00 |
| Beco Bench (Deep Silicon Wet Etching) | MRI |
$20.00 |
| SC1/SC2 Bench (RCA Wafer Clean) | MRI |
$20.00 |
| Spin Rinse Dryer - General | MRI |
$5.00 |
| Thin Film Deposition | ||
| Semicore Electron-beam Evaporator (per run) | MRI |
$45.00 |
| Kurt Lesker Thermal and Electron-beam Evaporator (per run) | MRI |
$42.00 |
| Spec Coatings Thermal Evaporator - Paralyene (per run) | MRI |
$42.00 |
| Electroplating System (Technic Inc.) | MRI |
$5.00 (6/1/08) |
| Kurt Lesker CMS-18 DC/RF Sputtering (per hour) | Keck |
$35.00 |
| FEI Dual Beam Focusing Ion Beam (per hour) | MRI |
$40.00 |
| Chemical Vapor Deposition | ||
| MRL LPCVD Silicon Nitride | MRI |
$45.00 |
| MRL LPCVD Low Temperature Oxide | MRI |
$45.00 |
| MRL LPCVD Polysilicon | MRI |
$45.00 |
| Applied Materials PECVD Dielectric | MRI |
$30.00 |
| Applied Materials PECVD Liquid Precursor | MRI |
$30.00 |
| Trion Technologies ICP PECVD Dielectric | EEW |
$25.00 |
| Cambridge Nanotech ALD Dielectric (per run) | MRI |
$50.00 |
| Thermal Processing | ||
| Dry Oxidation Furnace | MRI |
$40.00 |
| Wet Oxidation Furnace | MRI |
$40.00 |
| MRL (Black Max) Annealing Furnace | MRI |
$35.00 |
| N-type Diffusion Furnace | MRI |
$40.00 |
| P-type Annealing Furnace | MRI |
$40.00 |
| Lindberg Blue M Annealing Furnace | MRI |
$25.00 |
| Spin-on Dielectric Curing BCB Oven | MRI |
$15.00 |
| Rapid Thermal Processing | Keck |
included in $15/hour cleanroom fee |
| Rapid Thermal Annealing System | MRI |
$45.00 ($20.00 min. charge) |
| Dry Etching | ||
| M4L Plasma Surface Modification | MRI |
$12.00 |
| Plasma Therm 720 - Cl & F | MRI |
$20.00 |
| Trion Technologies ICP RIE - Cl & F | MRI |
$15.00 |
| Applied Materials MERIE Dielectric | MRI |
$22.00 |
| Alcatel Deep RIE Silicon (EEW) | EEW |
$55.00 |
| Xactix XeF2 Etcher | EEW |
$33.00 |
| Technics Micro RIE - O2 & F | Keck |
included in $15/hour cleanroom |
| Ion Mill (per run) | Keck |
$40.00 |
| Tegal 6500 HRe Cluster Etch System | MRI |
$50.00 ($25.00 min. charge) |
| Chemical Nanofabrication | ||
| Glove Box for Self Assembled Monolayer Deposition | MRI |
$25.00 |
| PDMS Processing Bench | MRI |
no charge |
| Smart Materials Processing (full lab access) | $12/hr for access | |
| UHT MP4150 Ceramic Punch | Keck |
|
| Carver Heated Platen Press | Keck |
|
| Carsten Tape Caster | Keck |
|
| Audion Vacuum Sealer | Keck |
|
| PTC ceramic cutter | Keck |
|
| Mettler balance | Keck |
|
| Presco/AMI Screen Printer 645 | Keck |
|
| Nicon profile projector V-12 | Keck |
|
| Schneeider & Marguard Ceramic Punch | Keck |
|
| RTC Three Zone Infrared Belt Furnace | Keck |
|
| New Long Screen Printer | Keck |
|
| PTC Isostatic Laminator 4004 | Keck |
|
| PTC Isostatic Laminator 4012 | Keck |
|
| Thinky Rotation/Revolution Mixer | Keck |
|
| Optical Microscope w/Motic Digital Camera | Keck |
|
| Tencor Profilometer | Keck |
|
| Process Inspection | ||
| Leitz Optical Microscope I | MRI |
no charge |
| Leitz Optical Microscope II | MRI |
no charge |
| Leica Optical Microscope II | Hosler |
no charge |
| Enviromental Scanning Electron Microscope | Hosler |
$33.00 |
| JEOL Field Emission Scanning Electron Microscope 6700F | Hosler |
$40.00 |
| LEO 1530 Field Emission Scanning Electron Microscope | MRI |
$42.00 |
| Sputter Coater for Scanning Electron Microscope | MRI |
no charge |
| Process Analysis | ||
| CV/IV Station | MRI |
$15.00 |
| Four Point Probe | MRI |
$15.00 |
| Cryogenic Electronic Test Station (DLTS) | MRI |
$15.00 |
| Gaertner Ellipsometer | MRI |
$15.00 |
| Nanospec Ellipsometer | MRI |
$15.00 |
| Woollam Ellipsometer | EEW |
$20.00 |
| Tencor 500 Profilometer (Nanofab) | MRI |
$15.00 |
| Wyko Profilometer | MRI |
$33.00 |
| Tencor Surfscan 4500 Surface Partical Inspection Analyzer | MRI |
$25.00 ($10.00 min. charge) |
| Tencor Flexis 2320 | MRI |
$35.00 |
| Nanometrics 8000X SE | MRI |
no charge |
| Chemical Nanostructure Analysis | ||
| Witec NSOM/Raman | MRI |
$30.00 |
| Omicron NSOM/AFM | MRI |
$35.00 |
| Atomic Force Microscopy | Hosler |
$33.00 |
| Atomic Force Microscopy | MRL |
$33.00 |
| JEOL AFM/STM 4500 | MRI |
$40.00 |
| Bruker Fourier Transform Infrared Spectrometer | MRI |
$30.00 |
| Field Emission Auger Electron Spectrosopy | MRI |
$30.00 |
| X-ray Photoelectron Spectroscopy | MRI |
$30.00 |
| Philips Pro MRD 4-Circle XRD | MRI |
$6.00 |
| Staff Time and Training | ||
| Staff Assisted Operation | $37.00 | |
| New Fab User Orientation/Safety Training | $125.00 | |
| Annual Recertification Training | $50.00 | |
| Training | per equipment | |
| PZT | ||
| PZT Coating less than or equal to 1um | Keck |
$285.00 |
| PZT Coating greater than 1um | Keck |
$570.00 |
| PZT solution 120 ml of .4 M Mn-PZT 30/70 | Keck |
$360.00 |
| PZT solution 120-150 ml of 0.2 M LaNiO3 (LNO) | Keck |
$245.00 |
| PZT solution 120 ml of 0.4 M PZT 52/48 | Keck |
$350.00 |
