philips mrd 4-circle / high resolution xrd

Manufacturer: Philips Analytical X-ray, The Netherlands (currently PANalytical)

Goniometer: Fully automated High Resolution (ω and 2Ө axes can be stepped by 0.0002˚). 4-circle (ω, 2Ө, sample tilt and rotation axes) with XYZ translation.

Incident Optics: Line focus mirror/monochromator provides Ka1 with <20arcsec angular divergence; Line focus mirror for parallel beam applications; Line focus programmable divergence slit with soller slits for B-B parafocusing; Multi capillary lens for point focus parallel beam applications.

Receiving Optics: Rocking curve slits; Bonce-Hart triple axis; Parallel Plate Collimators of varying sizes

Applications and Accessories: This is an excellent instrument for X-ray scattering experiments on nearly perfect semi-conductor material structures and other single crystal films on single crystal substrates. High resolution rocking curves and 2D or 3D reciprocal space maps can be acquired from such materials. Lesser quality single crystal and polycrystalline films can also be studied with appropriate optic selection. This versatile instrument is also capable of X-ray Reflectivity, In-Plane Diffraction, Stress and Texture studies. A 900˚ C domed heating stage can be used in many 4-circle experiments.

Analyses: Software is available for rocking curve analysis for epi-film strain, mismatch, relaxation, composition and thickness based on dynamic scattering theory and simulations. Residual stress, texture analysis, XRR simulation and fitting and more functions are also supported with commercial software products.

Sample Preparation: Please consult the MCL staff for appropriate sample forms and sizes.