Electron Probe MicroAnalysis (EPMA)
Description
Incident electrons ionize an atom in a sample producing an inner shell vacancy. The atom decays from excited state ultimately producing either a characteristic photon (x-ray fluorescence) or electron (the Auger electron). X-rays are separated by wavelength dispersion in EPMA which results in narrower peak widths and, consequently, a much more quantitative and sensitive analytical tool compared to energy dispersive spectroscopy. Finely focused electron beam and moderate spreading in sample allow analysis in 1-2 μm3 volumes.
Rates
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Technique Advantages
- rapid high magnification images of any solid sample
- qualitative (quantitative with standards) elemental analysis in areas down to 1 μm (EDS)
- 2-dimensional elemental mapping
Typical Applications
- quantitative chemical analyses of individual phases in multiphase materials.
- chemical diffusion studies at materials interfaces.
- chemical interaction of components in composites.
- studies of chemical attack by corrosion, weathering, slag penetration and other processes.
Sample Requirements
- Solid samples up to 1 inch in diameter and up to 5/8 inches thick.
- Samples must be flat and polished (preparation area equipped with various polishing media).
- Sample should be conducting (carbon coater available for non-conducting samples).
- Samples should be free of oil and/or other materials which would degas in a high vacuum environment.