Energy Dispersive X-Ray Spectroscopy (EDS)
Description
Energy Dispersive Spectroscopy (EDS) is a standard procedure for identifying and quantifying elemental composition of sample areas as small as a few cubic micrometers. The characteristic X-rays are produced when a material is bombarded with electrons in an electron beam instrument, such as a scanning electron microscope (SEM). Detection of these x-rays can be accomplished by an energy dispersive spectrometer, which is a solid state device that discriminates among X-ray energies.
Rates
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Technique Advantages
- rapid elemental analysis of small features
- 2 dimensional elemental mapping
- semi-quantitative analysis with standards
Typical Applications
- semi-quantitative elemental identification of micron-sized features
Sample Requirements
- any vacuum compatible solid (thin films, powders, fibers, bulk materials)
- highly polished mirror surface (preferred)

